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BSI 23/30479181 DC:2023 Edition

BSI 23/30479181 DC:2023 Edition

$13.70

BS IEC 62047-48. Semiconductor devices. Micro-electromechanical devices – Part 48. Test method of determining solution concentration by optical absorption using MEMS fluidic device

Published By Publication Date Number of Pages
BSI 2023 18
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PDF Catalog

PDF Pages PDF Title
7 INTRODUCTION
8 1 Scope
2 Normative references
3 Terms and definitions
4 Test method
4.1 General
10 4.1.1 Molar absorption coefficient, a
4.1.2 Optical path length, b
4.1.3 Absorbance, A
4.1.4 Surface temperature of MEMS fluidic device
4.1.5 Molar concentration, c
11 4.2 Test specimen
4.2.1 Configuration of concentration measuring unit for test specimen
4.2.2 Layer stack of the MEMS fluidic device
12 4.2.3 Size and shape of the micro-channel
13 4.2.4 Configuration of solution concentration measuring system
15 4.3 Test procedure
16 5 Data analysis
5.1 Calculating results
5.2 Test report
18 Bibliography

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BSI 23/30479181 DC
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