ASTM-F1709:1997 Edition
$35.75
F1709-97 Standard Specification for High Purity Titanium Sputtering Targets for Electronic Thin Film Applications
| Published By | Publication Date | Number of Pages |
| ASTM | 1997 | 3 |
1.1 This specification covers pure titanium sputtering targets used as a raw material in fabricating semiconductor electronic devices.
1.2 This standard sets purity grade levels, physical attributes, analytical methods, and packaging.
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