ASTM-E673 2003
$40.63
E673-03 Standard Terminology Relating to Surface Analysis
| Published By | Publication Date | Number of Pages |
| ASTM | 2003 | 10 |
ASTM E673-03
Withdrawn Standard: Standard Terminology Relating to Surface Analysis (Withdrawn 2012)
ASTM E673
Scope
1.1 This terminology is related to the various disciplines involved in surface analysis.
1.2 The definitions listed apply to (a) Auger electron spectroscopy (AES), (b) X-ray photoelectron spectroscopy (XPS), (c) ion-scattering spectroscopy (ISS), (d) secondary ion mass spectrometry (SIMS), and (e) energetic ion analysis (EIA).
Keywords
terminology; surface analysis
ICS Code
ICS Number Code 01.040.17 (Metrology and measurement. Physical phenomena (Vocabularies))
DOI: 10.1520/E0673-03
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