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ISO 18516:2019

ISO 18516:2019

$50.70

Surface chemical analysis — Determination of lateral resolution and sharpness in beam based methods with a range from nanometres to micrometres

Published By Publication Date Number of Pages
ISO 2019-01 60
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This document describes methods for measuring lateral resolution and sharpness in imaging surface chemical analysis. It applies to all methods of surface analysis which use a beam to analyse the chemical composition of surfaces under defined settings of an instrument. It applies to scanning instruments, where a finely focused beam is scanned over the sample in a preselected field of view, as well as to full field imaging instruments, where the field of view is simultaneously imaged by a broad beam, an imaging lens system and a pixelated detector. The methods for measuring lateral resolution and sharpness are

— the straight edge method;

— the narrow line method;

— the grating method.

This document applies to instruments and methods that provide information on layers with nanometre thicknesses and to surfaces with nanometre-sized structures and individual nano-objects.

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ISO 18516:2019
$50.70