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BS ISO 16700:2016

BS ISO 16700:2016

$142.49

Microbeam analysis. Scanning electron microscopy. Guidelines for calibrating image magnification

Published By Publication Date Number of Pages
BSI 2016 30
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This International Standard specifies a method for calibrating the magnification of images generated by a scanning electron microscope (SEM) using an appropriate reference material. This method is limited to magnifications determined by the available size range of structures in the calibrating reference material. This International Standard does not apply to the dedicated critical dimension measurement SEM.

PDF Catalog

PDF Pages PDF Title
6 Foreword
7 Introduction
9 1 Scope
2 Normative references
3 Terms and definitions
11 4 Image magnification
4.1 Scale marker
4.2 Expressing magnification
5 Reference material
5.1 General
12 5.2 Requirements for CRM
5.3 Pitch patterns on CRM
5.4 Storage and handling
13 6 Calibration procedures
6.1 General
6.2 Mounting CRM
6.3 Setting SEM operation conditions for calibration
14 6.4 Image recording
6.5 Measurement of image
15 6.6 Calibration of magnification and scale marker
6.6.1 General
6.6.2 Magnification
6.6.3 Scale marker
16 7 Accuracy of image magnification and scale marker
17 8 Calibration report
8.1 General
8.2 Contents of calibration report
19 Annex A (informative) Reference materials for magnification
21 Annex B (informative) Parameters that influence the resultant magnification of an SEM
23 Annex C (informative) Uncertainties in magnification measurements
24 Annex D (informative) Example of a test report
26 Bibliography

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BS ISO 16700:2016
$142.49