BS ISO 14701:2018 – TC:2020 Edition
$186.33
Tracked Changes. Surface chemical analysis. X-ray photoelectron spectroscopy. Measurement of silicon oxide thickness
| Published By | Publication Date | Number of Pages |
| BSI | 2020 | 54 |
PDF Catalog
| PDF Pages | PDF Title |
|---|---|
| 1 | compares BS ISO 14701:2018 |
| 2 | TRACKED CHANGES Text example 1 — indicates added text (in green) |
| 30 | National foreword |
| 34 | Foreword |
| 35 | Introduction |
| 37 | 1 Scope 2 Normative references 3 Terms and definitions 4 Abbreviated terms and symbols 4.1 Abbreviated terms 4.2 Symbols |
| 38 | 5 Outline of method |
| 40 | 6 Method for measuring the oxide thickness 6.1 Cleaning and preparing the sample |
| 41 | 6.2 Mounting the sample 6.3 Choosing spectrometer settings |
| 44 | 6.4 Recording data |
| 45 | 6.5 Measuring intensities |
| 48 | 6.6 Calculating the oxide thickness |
| 49 | 6.7 Calculating the uncertainty of the oxide thickness |
| 51 | Bibliography |
