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BS ISO 14701:2011

$142.49

Surface chemical analysis. X-ray photoelectron spectroscopy. Measurement of silicon oxide thickness

Published By Publication Date Number of Pages
BSI 2011 24
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Status

Withdrawn

Title

Surface chemical analysis. X-ray photoelectron spectroscopy. Measurement of silicon oxide thickness

Publisher

BSI

Committee

CII/60

Pages

24

Publication Date

2011-08-31

Withdrawn Date

2018-11-05

Replaced By

BS ISO 14701:2018

ISBN

978 0 580 69624 4

Standard Number

BS ISO 14701:2011

Identical National Standard Of

ISO 14701:2011

Descriptors

Silicon, Surface chemistry, Surface properties, X-ray photoelectron spectroscopy, Chemical analysis and testing, Thickness measurement, Electron emission, Photoelectron spectroscopy, Oxides, Spectroscopy

ICS Codes 71.040.40 - Chemical analysis
BS ISO 14701:2011
$142.49