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BS ISO 14594:2024

$142.49

Microbeam analysis. Electron probe microanalysis. Guidelines for the determination of experimental parameters for wavelength dispersive spectroscopy

Published By Publication Date Number of Pages
BSI 2024 28
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PDF Catalog

PDF Pages PDF Title
2 undefined
6 Foreword
7 Introduction
9 1 Scope
2 Normative references
3 Terms and definitions
11 4 Abbreviated terms
5 Experimental parameters
5.1 General
5.2 Parameters related to the electron probe
5.2.1 Accelerating voltage
5.2.2 Probe current
5.2.3 Magnification and field of view
5.3 Parameters related to wavelength dispersive X-ray spectrometers
5.3.1 General
12 5.3.2 Take-off angle
5.3.3 Wavelength resolution
5.3.4 X-ray detector and Pulse height analyser
5.3.5 Peak location (wavelength)
13 5.3.6 Background
5.4 Parameters related to the specimen
5.4.1 Specimen stage
5.4.2 Surface roughness
5.4.3 X-ray line
5.4.4 Analysis volume
14 6 Procedures and measurements
6.1 General
6.2 Electron probe
6.2.1 Probe current
6.2.2 Probe diameter
15 6.3 Parameters related to measured peaks
6.3.1 Dead time correction
6.3.2 Wavelength resolution of detected characteristic X-ray peaks
16 6.3.3 Background subtraction
17 6.4 Parameters related to the specimen
6.4.1 General
6.4.2 Analysis area
6.4.3 Analysis depth
6.4.4 Analysis volume
7 Test report
19 Annex A (informative) Methods of estimating analysis area
21 Annex B (informative) Methods of estimating analysis depth
22 Annex C (informative) Method of estimating X-ray analysis volume by applying the Monte Carlo (MC) simulation
26 Bibliography
BS ISO 14594:2024
$142.49