BS ISO 14594:2024
$142.49
Microbeam analysis. Electron probe microanalysis. Guidelines for the determination of experimental parameters for wavelength dispersive spectroscopy
Published By | Publication Date | Number of Pages |
BSI | 2024 | 28 |
PDF Catalog
PDF Pages | PDF Title |
---|---|
2 | undefined |
6 | Foreword |
7 | Introduction |
9 | 1 Scope 2 Normative references 3 Terms and definitions |
11 | 4 Abbreviated terms 5 Experimental parameters 5.1 General 5.2 Parameters related to the electron probe 5.2.1 Accelerating voltage 5.2.2 Probe current 5.2.3 Magnification and field of view 5.3 Parameters related to wavelength dispersive X-ray spectrometers 5.3.1 General |
12 | 5.3.2 Take-off angle 5.3.3 Wavelength resolution 5.3.4 X-ray detector and Pulse height analyser 5.3.5 Peak location (wavelength) |
13 | 5.3.6 Background 5.4 Parameters related to the specimen 5.4.1 Specimen stage 5.4.2 Surface roughness 5.4.3 X-ray line 5.4.4 Analysis volume |
14 | 6 Procedures and measurements 6.1 General 6.2 Electron probe 6.2.1 Probe current 6.2.2 Probe diameter |
15 | 6.3 Parameters related to measured peaks 6.3.1 Dead time correction 6.3.2 Wavelength resolution of detected characteristic X-ray peaks |
16 | 6.3.3 Background subtraction |
17 | 6.4 Parameters related to the specimen 6.4.1 General 6.4.2 Analysis area 6.4.3 Analysis depth 6.4.4 Analysis volume 7 Test report |
19 | Annex A (informative) Methods of estimating analysis area |
21 | Annex B (informative) Methods of estimating analysis depth |
22 | Annex C (informative) Method of estimating X-ray analysis volume by applying the Monte Carlo (MC) simulation |
26 | Bibliography |