BS ISO 13084:2018
$142.49
Surface chemical analysis. Secondary ion mass spectrometry. Calibration of the mass scale for a time-of-flight secondary ion mass spectrometer
| Published By | Publication Date | Number of Pages |
| BSI | 2018 | 24 |
This document specifies a method to optimize the mass calibration accuracy in time-of-flight secondary ion mass spectrometry (SIMS) instruments used for general analytical purposes. It is only applicable to time-of-flight instruments but is not restricted to any particular instrument design. Guidance is provided for some of the instrumental parameters that can be optimized using this procedure and the types of generic peaks suitable to calibrate the mass scale for optimum mass accuracy.
PDF Catalog
| PDF Pages | PDF Title |
|---|---|
| 2 | National foreword |
| 6 | Foreword |
| 7 | Introduction |
| 9 | 1 Scope 2 Normative references 3 Terms and definitions 4 Symbols and abbreviated terms 4.1 Symbols |
| 10 | 4.2 Abbreviated terms 5 Outline of method |
| 11 | 6 Method for improving mass accuracy 6.1 Obtaining the reference sample for optimization |
| 12 | 6.2 Preparation of polycarbonate sample 6.3 Obtaining the SIMS spectral data |
| 13 | 6.4 Calculating mass accuracy |
| 15 | 6.5 Optimizing instrumental parameters |
| 17 | 6.6 Calibration procedure |
| 19 | Annex A (informative) Calibration uncertainty |
| 21 | Annex B (informative) Internal addition method |
| 23 | Bibliography |
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BS ISO 13084:2018 – TC:2020 Edition
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