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BS EN ISO 25178-605:2014

BS EN ISO 25178-605:2014

$167.15

Geometrical product specifications (GPS). Surface texture: Areal – Nominal characteristics of non-contact (point autofocus probe) instruments

Published By Publication Date Number of Pages
BSI 2014 42
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This part of ISO 25178 describes the metrological characteristics of a non-contact instrument for measuring surface texture using point autofocus probing.

PDF Catalog

PDF Pages PDF Title
4 Foreword
6 Foreword
8 Introduction
9 Section sec_1
Section sec_2
Section sec_3
1 Scope
2 Normative references
3 Terms and definitions
10 Section sec_3.1
Section sec_3.1.1
Section sec_3.1.2
Section sec_3.1.3
Table tab_a
Figure fig_1
3.1 Terms and definitions related to all areal surface texture measurement methods
11 Section sec_3.1.4
Section sec_3.1.5
Section sec_3.1.6
Section sec_3.1.7
Section sec_3.1.8
12 Table tab_b
Figure fig_2
13 Table tab_c
Figure fig_3
Section sec_3.1.9
Section sec_3.1.10
14 Section sec_3.1.11
Section sec_3.1.12
Section sec_3.1.13
Section sec_3.1.14
Section sec_3.1.15
15 Figure fig_4
Figure fig_5
Figure fig_6
Figure fig_7
16 Section sec_3.1.16
Section sec_3.1.17
Section sec_3.1.18
Section sec_3.1.19
Section sec_3.1.20
17 Table tab_1
Section sec_3.2
Section sec_3.2.1
Section sec_3.2.2
3.2 Terms and definitions related to x- and y-scanning systems
18 Table tab_2
Section sec_3.2.3
Section sec_3.2.4
Section sec_3.2.5
Section sec_3.2.6
Section sec_3.2.7
19 Section sec_3.3
Section sec_3.3.1
Section sec_3.3.2
Section sec_3.3.3
Section sec_3.3.4
Section sec_3.3.5
Table tab_d
Figure fig_8
3.3 Terms and definitions related to optical systems
20 Section sec_3.3.6
Section sec_3.3.7
Section sec_3.3.8
Section sec_3.4
Section sec_3.4.1
Section sec_3.4.2
Section sec_3.4.3
3.4 Terms and definitions related to optical properties of workpiece
21 Section sec_3.4.4
Section sec_3.4.5
Section sec_3.4.6
Section sec_3.5
Section sec_3.5.1
Section sec_3.5.2
Section sec_3.5.3
Section sec_3.5.4
Section sec_3.5.5
Section sec_3.5.6
Section sec_3.5.7
3.5 Terms and definitions specific to point autofocus profiling
22 Section sec_3.5.8
Section sec_3.5.9
Section sec_3.5.10
Section sec_3.5.11
Section sec_3.5.12
Section sec_3.5.13
Section sec_3.5.14
Section sec_4
Section sec_4.1
Section sec_4.2
4 Descriptions of the influence quantities
4.1 General
4.2 Influence quantities
23 Table tab_3
24 Annex sec_A
Annex sec_A.1
Annex sec_A.2
Annex A
(informative)

General principles

25 Table tab_e
Figure fig_A.1
27 Figure fig_A.2
28 Annex sec_B
Annex B
(informative)

Spot size and focal shift

29 Figure fig_B.1
30 Table tab_g
Figure fig_B.2
31 Annex sec_C
Annex C
(informative)

Beam offset direction and maximum acceptable local slope

33 Table tab_h
Figure fig_C.1
34 Annex sec_D
Annex sec_D.1
Figure fig_D.1
Annex sec_D.2
Annex D
(informative)

Features of an areal surface texture measuring instrument

35 Annex sec_D.3
36 Annex sec_E
Table tab_E.1
Annex E
(informative)

Others: Non-measured point (autofocus error)

37 Annex sec_F
Annex sec_F.1
Annex sec_F.2
Figure fig_.1
Annex F
(informative)

Relation to the GPS matrix

38 Annex sec_F.3
39 Reference ref_1
Reference ref_2
Reference ref_3
Reference ref_4
Reference ref_5
Reference ref_6
Reference ref_7
Reference ref_8
Reference ref_9
Reference ref_10
Reference ref_11
Reference ref_12
Reference ref_13
Reference ref_14
Reference ref_15
Bibliography

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BS EN ISO 25178-605:2014
$167.15