AS ISO 14606:2006
$30.55
Surface chemical analysis – Sputter depth profiling – Optimization using layered systems as reference materials
| Published By | Publication Date | Number of Pages |
| AS | 2006-10-20 | 24 |
Adopts ISO 14606:2000 to give guidance on the optimization of sputter depth profiling parameters using appropriate single-layered and multi-layered reference materials in order to achieve optimum depth resolution as a function of instrument settings.
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