{"id":424345,"date":"2024-10-20T06:51:17","date_gmt":"2024-10-20T06:51:17","guid":{"rendered":"https:\/\/pdfstandards.shop\/product\/uncategorized\/bsi-23-30468947-dc-2023\/"},"modified":"2024-10-26T12:52:55","modified_gmt":"2024-10-26T12:52:55","slug":"bsi-23-30468947-dc-2023","status":"publish","type":"product","link":"https:\/\/pdfstandards.shop\/product\/publishers\/bsi\/bsi-23-30468947-dc-2023\/","title":{"rendered":"BSI 23\/30468947 DC 2023"},"content":{"rendered":"

PDF Catalog<\/h4>\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n
PDF Pages<\/th>\nPDF Title<\/th>\n<\/tr>\n
1<\/td>\n30468947-NC.pdf <\/td>\n<\/tr>\n
3<\/td>\n49_1406e_CD.pdf <\/td>\n<\/tr>\n
8<\/td>\nFOREWORD <\/td>\n<\/tr>\n
10<\/td>\nINTRODUCTION <\/td>\n<\/tr>\n
11<\/td>\n1 Scope
2 Normative references
3 Terms and definitions
3.1 Single crystals for SAW wafer <\/td>\n<\/tr>\n
12<\/td>\n3.2 Terms and definitions related to LN and LT crystals
3.3 Terms and definitions related to all crystals <\/td>\n<\/tr>\n
13<\/td>\n3.4 Flatness <\/td>\n<\/tr>\n
15<\/td>\n3.5 Definitions of appearance defects <\/td>\n<\/tr>\n
16<\/td>\n3.6 Other terms and definitions <\/td>\n<\/tr>\n
17<\/td>\n4 Requirements
4.1 Material specification
4.1.1 Synthetic quartz crystal
4.1.2 LN
4.1.3 LT
4.1.4 LBO, LGS <\/td>\n<\/tr>\n
18<\/td>\n4.2 Wafer specifications
4.2.1 General
4.2.2 Diameters and tolerances
4.2.3 Thickness and tolerance
4.2.4 Orientation flat
4.2.5 Secondary flat <\/td>\n<\/tr>\n
19<\/td>\n4.2.6 Back surface roughness
4.2.7 Warp
4.2.8 TV5, TTV <\/td>\n<\/tr>\n
20<\/td>\n4.2.9 LTV, PLTV
4.2.10 Front (propagation) surface finish
4.2.11 Front surface defects
4.2.12 Surface orientation tolerance
4.2.13 Inclusions
4.2.14 Etch channel number and position of seed for quartz wafer <\/td>\n<\/tr>\n
21<\/td>\n4.2.15 Bevel
4.2.16 Curie temperature and tolerance
4.2.17 Lattice constant
4.2.18 Bulk resistivity (conductivity) for reduced LN and LT
4.2.19 Transmittance
4.2.20 Lightness
4.2.21 Colour difference
5 Sampling plan
5.1 General <\/td>\n<\/tr>\n
22<\/td>\n5.2 Sampling
5.3 Sampling frequency
5.4 Inspection of whole population
6 Test methods
6.1 Diameter
6.2 Thickness
6.3 Dimension of OF
6.4 Orientation of OF <\/td>\n<\/tr>\n
23<\/td>\n6.5 TV5
6.6 Warp
6.7 TTV, LTV and PLTV
6.8 Front surface defects
6.9 Inclusions
6.10 Back surface roughness
6.11 Orientation
6.12 Curie temperature
6.13 Lattice constant
6.14 Bulk resistivity
6.15 Transmittance
6.16 Lightness
6.17 Colour difference
7 Identification, labelling, packaging, delivery condition
7.1 Packaging
7.2 Labelling and identification <\/td>\n<\/tr>\n
24<\/td>\n7.3 Delivery condition
8 Measurement of Curie temperature
8.1 General
8.2 DTA method
8.3 Dielectric constant method <\/td>\n<\/tr>\n
25<\/td>\n9 Measurement of lattice constant (Bond method) <\/td>\n<\/tr>\n
26<\/td>\n10 Measurement of face angle by X-ray
10.1 Measurement principle <\/td>\n<\/tr>\n
27<\/td>\n10.2 Measurement method
10.3 Measuring surface orientation of wafer
10.4 Measuring OF flat orientation
10.5 Typical wafer orientations and reference planes <\/td>\n<\/tr>\n
28<\/td>\n11 Measurement of bulk resistivity
11.1 Resistance measurement of a wafer
11.2 Electrode <\/td>\n<\/tr>\n
29<\/td>\n11.3 Bulk resistivity
12 Visual inspections \u2013 Front surface inspection method <\/td>\n<\/tr>\n
30<\/td>\n13 Measurement of thickness and thickness variation
13.1 Measurement principle
13.1.1 Contact measurement
13.1.2 Contactless measurement
13.2 Sample
13.3 Measurement method
13.3.1 Contact measurement
13.3.2 Contactless measurement
13.3.2.1 Contactless point measurement
13.3.2.2 Contactless area scanning measurement <\/td>\n<\/tr>\n
31<\/td>\n14 Measurement of transmittance
14.1 Measurement principle
14.2 Sample
14.3 Measurement method
15 Measurement of lightness and colour difference
15.1 Measurement principle
15.2 Sample
15.3 Measurement method <\/td>\n<\/tr>\n
33<\/td>\nAnnex A (normative) Expression using Euler angle description for piezoelectric single crystals <\/td>\n<\/tr>\n
36<\/td>\nAnnex B (informative) Manufacturing process for SAW wafers
B.1 Crystal growth methods
B.1.1 Czochralski growth method <\/td>\n<\/tr>\n
38<\/td>\nB.1.2 Vertical Bridgman method <\/td>\n<\/tr>\n
39<\/td>\nB.2 Standard mechanical wafer manufacturing
B.2.1 Process flow-chart <\/td>\n<\/tr>\n
40<\/td>\nB.2.2 Cutting both ends and cylindrical grinding
B.2.3 Marking orientation
B.2.4 Slicing <\/td>\n<\/tr>\n
41<\/td>\nB.2.5 Double-sided lapping
B.2.6 Bevelling (edge rounding)
B.2.7 Mirror polishing <\/td>\n<\/tr>\n
42<\/td>\nAnnex C (informative) Measurement principle of lightness and colour difference <\/td>\n<\/tr>\n
43<\/td>\nBibliography <\/td>\n<\/tr>\n<\/table>\n","protected":false},"excerpt":{"rendered":"

BS EN 62276. Single crystal wafers for surface acoustic wave (SAW) device applications. Specifications and measuring methods<\/b><\/p>\n\n\n\n\n
Published By<\/td>\nPublication Date<\/td>\nNumber of Pages<\/td>\n<\/tr>\n
BSI<\/b><\/a><\/td>\n2023<\/td>\n44<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n","protected":false},"featured_media":424353,"template":"","meta":{"rank_math_lock_modified_date":false,"ep_exclude_from_search":false},"product_cat":[526,2641],"product_tag":[],"class_list":{"0":"post-424345","1":"product","2":"type-product","3":"status-publish","4":"has-post-thumbnail","6":"product_cat-29-140-99","7":"product_cat-bsi","9":"first","10":"instock","11":"sold-individually","12":"shipping-taxable","13":"purchasable","14":"product-type-simple"},"_links":{"self":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product\/424345","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/types\/product"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/media\/424353"}],"wp:attachment":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/media?parent=424345"}],"wp:term":[{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product_cat?post=424345"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product_tag?post=424345"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}