This document provides requirements and guidelines for assessing the chemical airborne cleanliness of equipment and materials which are foreseen to be used in cleanrooms and associated controlled environments which are linked to the ISO standard for cleanliness classes by chemical concentration (see ISO 14644-8).<\/p>\n
The following are outside the scope of this document:<\/p>\n
health and safety requirements;<\/p>\n<\/li>\n
compatibility with cleaning agents and techniques;<\/p>\n<\/li>\n
cleanability;<\/p>\n<\/li>\n
biocontamination;<\/p>\n<\/li>\n
specific requirements of equipment and materials for processes and products;<\/p>\n<\/li>\n
design details of equipment.<\/p>\n<\/li>\n<\/ul>\n
| PDF Pages<\/th>\n | PDF Title<\/th>\n<\/tr>\n | ||||||
|---|---|---|---|---|---|---|---|
| 2<\/td>\n | undefined <\/td>\n<\/tr>\n | ||||||
| 6<\/td>\n | Foreword <\/td>\n<\/tr>\n | ||||||
| 7<\/td>\n | Introduction <\/td>\n<\/tr>\n | ||||||
| 8<\/td>\n | 1 Scope 2 Normative references 3 Terms and definitions <\/td>\n<\/tr>\n | ||||||
| 11<\/td>\n | 4 Symbols <\/td>\n<\/tr>\n | ||||||
| 12<\/td>\n | 5 Test setup 5.1 General 5.2 Closed design <\/td>\n<\/tr>\n | ||||||
| 13<\/td>\n | 5.3 Closed design special application <\/td>\n<\/tr>\n | ||||||
| 14<\/td>\n | 5.4 Open design 6 Representative mode 6.1 Equipment 6.2 Material <\/td>\n<\/tr>\n | ||||||
| 15<\/td>\n | 7 Visual inspection 7.1 General 7.2 Equipment 7.3 Material <\/td>\n<\/tr>\n | ||||||
| 16<\/td>\n | 8 Test description 9 Calculation of the measured concentrations <\/td>\n<\/tr>\n | ||||||
| 17<\/td>\n | 10 Calculation of specific emission rate 10.1 Calculation of specific emission rate \u2014 Closed design <\/td>\n<\/tr>\n | ||||||
| 18<\/td>\n | 10.2 Calculation of specific emission rate \u2014 Open design 11 Assessment 11.1 General <\/td>\n<\/tr>\n | ||||||
| 19<\/td>\n | 11.2 Required input data 11.3 Calculation to determine the effect on a cleanroom or controlled zone <\/td>\n<\/tr>\n | ||||||
| 20<\/td>\n | 11.4 Assessment of the suitability of material(s) or equipment for an existing cleanroom or controlled zone 12 Documentation 12.1 General 12.2 Common documentation requirements <\/td>\n<\/tr>\n | ||||||
| 21<\/td>\n | 12.3 Test documentation 12.4 Visual inspection 12.4.1 Equipment 12.4.2 Materials <\/td>\n<\/tr>\n | ||||||
| 22<\/td>\n | Annex A (informative) Example calculation for suitability assessment of one equipment (existing installation) <\/td>\n<\/tr>\n | ||||||
| 24<\/td>\n | Annex B (informative) Example calculation for suitability assessment of wall material (existing cleanroom\/clean zone installation) <\/td>\n<\/tr>\n | ||||||
| 26<\/td>\n | Annex C (informative) Suitability assessment of a combination of equipment and floor material in a cleanroom to be designed <\/td>\n<\/tr>\n | ||||||
| 28<\/td>\n | Bibliography <\/td>\n<\/tr>\n<\/table>\n","protected":false},"excerpt":{"rendered":" Cleanrooms and associated controlled environments – Assessment of suitability for use of equipment and materials by airborne chemical concentration<\/b><\/p>\n |