ASTM-F775 1988
$40.63
F775-88 Test Method for Wafer and Slice Flatness by Interferometric (Withdrawn 1991)
Published By | Publication Date | Number of Pages |
ASTM | 1988 |
ASTM F775-88
Withdrawn Standard: Test Method for Wafer and Slice Flatness by Interferometric (Withdrawn 1991)
ASTM F775
Scope
Keywords
ICS Code
ICS Number Code 29.045 (Semiconducting materials)
DOI: