ISO 17973:2016

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Surface chemical analysis — Medium-resolution Auger electron spectrometers — Calibration of energy scales for elemental analysis

Published By	Publication Date	Number of Pages
ISO	2016-09	18

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Categories: 71.040.40 - Chemical analysis, ISO

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Description

ISO 17973:2016 specifies a method for calibrating the kinetic energy scales of Auger electron spectrometers with an uncertainty of 3 eV, for general analytical use in identifying elements at surfaces. In addition, it specifies a method for establishing a calibration schedule. It is applicable to instruments used in either direct or differential mode, where the resolution is less than or equal to 0,5 % and the modulation amplitude for the differential mode, if used, is 2 eV peak-to-peak. It is applicable to those spectrometers equipped with an inert gas ion gun or other method for sample cleaning and with an electron gun capable of operating at 4 keV or higher beam energy.

Additional information

Published Code	ISO
Published By	International Organization for Standardization
Publication Date	2016-09
Pages Count	18
Language	English
Edition	2
File Size	440.3 KB
ICS Codes	71.040.40 - Chemical analysis

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ISO 17973:2016

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